factual

Roughly 3.5 EUV tools support one gigawatt of AI

A gigawatt of Nvidia Rubin capacity needs ~55,000 wafers of 3nm (with ~20 EUV passes each, ~1.1M passes), plus 5nm and 170,000 DRAM wafers, totaling ~2 million EUV passes; at 75 wafers/hour and ~90% uptime, that requires about 3.5 EUV tools (~$1.2B) to underpin ~$50B of data-center CapEx and ~$100B of AI value.

factualpending

Speaker

Dylan Patel

Evidence Quote

what do three and a half EUV tools cost? That’s $1.2 billion...held up by this $1.2 billion worth of tooling that simply cannot expand its supply chain quickly.

Source

Dwarkesh Patel Podcast - Dylan Patel — Deep dive on the 3 big bottlenecks to scaling AI computeDwarkesh Patel Podcast
Created: 6/13/2026, 3:34:26 AM

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